JPS6283128U - - Google Patents
Info
- Publication number
- JPS6283128U JPS6283128U JP17603585U JP17603585U JPS6283128U JP S6283128 U JPS6283128 U JP S6283128U JP 17603585 U JP17603585 U JP 17603585U JP 17603585 U JP17603585 U JP 17603585U JP S6283128 U JPS6283128 U JP S6283128U
- Authority
- JP
- Japan
- Prior art keywords
- air
- turntable
- shower
- suction port
- rotary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003638 chemical reducing agent Substances 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985176035U JPH0228351Y2 (en]) | 1985-11-15 | 1985-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985176035U JPH0228351Y2 (en]) | 1985-11-15 | 1985-11-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6283128U true JPS6283128U (en]) | 1987-05-27 |
| JPH0228351Y2 JPH0228351Y2 (en]) | 1990-07-30 |
Family
ID=31115905
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985176035U Expired JPH0228351Y2 (en]) | 1985-11-15 | 1985-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0228351Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008281328A (ja) * | 2007-04-13 | 2008-11-20 | Semiconductor Energy Lab Co Ltd | エアシャワー装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6187587U (en]) * | 1984-11-16 | 1986-06-07 |
-
1985
- 1985-11-15 JP JP1985176035U patent/JPH0228351Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6187587U (en]) * | 1984-11-16 | 1986-06-07 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008281328A (ja) * | 2007-04-13 | 2008-11-20 | Semiconductor Energy Lab Co Ltd | エアシャワー装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0228351Y2 (en]) | 1990-07-30 |